Listed

Axcelis Technologies Inc

ACLSNasdaqCIK 1113232IndustrialsFiscal year ends Dec 31

Standardized line items from XBRL company facts, the last twelve quarters. Negative values are in parentheses. A figure marked d is derived from year-to-date figures.

Income statement

Revenue$215.2m, Q2 FY2026
Operating income$20.3m, Q2 FY2026
Net income$23.3m, Q2 FY2026
Axcelis Technologies Inc, income statement, quarterly
Line itemUnitQ3 FY20232023-09-30Q4 FY20232023-12-31Q1 FY20242024-03-31Q2 FY20242024-06-30Q3 FY20242024-09-30Q4 FY20242024-12-31Q1 FY20252025-03-31Q2 FY20252025-06-30Q3 FY20252025-09-30Q4 FY20252025-12-31Q1 FY20262026-03-31Q2 FY20262026-06-30
Revenue$m292Revenue, Q3 FY2023, three months to 2023-09-30$292.3m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure310Revenue, Q4 FY2023, three months to 2023-12-31$310.3m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure252Revenue, Q1 FY2024, three months to 2024-03-31$252.4m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure257Revenue, Q2 FY2024, three months to 2024-06-30$256.5m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure257Revenue, Q3 FY2024, three months to 2024-09-30$256.6m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure252Revenue, Q4 FY2024, three months to 2024-12-31$252.4m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure193Revenue, Q1 FY2025, three months to 2025-03-31$192.6m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure195Revenue, Q2 FY2025, three months to 2025-06-30$194.5m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure214Revenue, Q3 FY2025, three months to 2025-09-30$213.6m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure238Revenue, Q4 FY2025, three months to 2025-12-31$238.3m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure199Revenue, Q1 FY2026, three months to 2026-03-31$199.0m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure215Revenue, Q2 FY2026, three months to 2026-06-30$215.2m. XBRL concept us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Cost of revenue$m163Cost of revenue, Q3 FY2023, three months to 2023-09-30$162.6m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure172Cost of revenue, Q4 FY2023, three months to 2023-12-31$172.4m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure136Cost of revenue, Q1 FY2024, three months to 2024-03-31$136.3m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure144Cost of revenue, Q2 FY2024, three months to 2024-06-30$144.1m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure147Cost of revenue, Q3 FY2024, three months to 2024-09-30$146.6m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure136Cost of revenue, Q4 FY2024, three months to 2024-12-31$136.2m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure104Cost of revenue, Q1 FY2025, three months to 2025-03-31$103.8m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure107Cost of revenue, Q2 FY2025, three months to 2025-06-30$107.2m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure125Cost of revenue, Q3 FY2025, three months to 2025-09-30$124.8m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure126Cost of revenue, Q4 FY2025, three months to 2025-12-31$126.4m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure118Cost of revenue, Q1 FY2026, three months to 2026-03-31$118.4m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure124Cost of revenue, Q2 FY2026, three months to 2026-06-30$124.0m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Gross profit$m130Gross profit, Q3 FY2023, three months to 2023-09-30$129.7m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure138Gross profit, Q4 FY2023, three months to 2023-12-31$137.9m. XBRL concept us-gaap:GrossProfit. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure116Gross profit, Q1 FY2024, three months to 2024-03-31$116.1m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure112Gross profit, Q2 FY2024, three months to 2024-06-30$112.4m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure110Gross profit, Q3 FY2024, three months to 2024-09-30$110.0m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure116Gross profit, Q4 FY2024, three months to 2024-12-31$116.2m. XBRL concept us-gaap:GrossProfit. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure88.8Gross profit, Q1 FY2025, three months to 2025-03-31$88.8m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure87.3Gross profit, Q2 FY2025, three months to 2025-06-30$87.3m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure88.8Gross profit, Q3 FY2025, three months to 2025-09-30$88.8m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure112Gross profit, Q4 FY2025, three months to 2025-12-31$111.9m. XBRL concept us-gaap:GrossProfit. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure80.6Gross profit, Q1 FY2026, three months to 2026-03-31$80.6m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure91.2Gross profit, Q2 FY2026, three months to 2026-06-30$91.2m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Research and development$m24.1Research and development, Q3 FY2023, three months to 2023-09-30$24.1m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure24.9Research and development, Q4 FY2023, three months to 2023-12-31$24.9m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure25.7Research and development, Q1 FY2024, three months to 2024-03-31$25.7m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure25.8Research and development, Q2 FY2024, three months to 2024-06-30$25.8m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure26.4Research and development, Q3 FY2024, three months to 2024-09-30$26.4m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure27.7Research and development, Q4 FY2024, three months to 2024-12-31$27.7m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure27.1Research and development, Q1 FY2025, three months to 2025-03-31$27.1m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure27.1Research and development, Q2 FY2025, three months to 2025-06-30$27.1m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure24.6Research and development, Q3 FY2025, three months to 2025-09-30$24.6m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure30.1Research and development, Q4 FY2025, three months to 2025-12-31$30.1m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure28.5Research and development, Q1 FY2026, three months to 2026-03-31$28.5m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure29.0Research and development, Q2 FY2026, three months to 2026-06-30$29.0m. XBRL concept us-gaap:ResearchAndDevelopmentExpense. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Operating income$m71.7Operating income, Q3 FY2023, three months to 2023-09-30$71.7m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure79.1Operating income, Q4 FY2023, three months to 2023-12-31$79.1m. XBRL concept us-gaap:OperatingIncomeLoss. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure56.5Operating income, Q1 FY2024, three months to 2024-03-31$56.5m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure52.8Operating income, Q2 FY2024, three months to 2024-06-30$52.8m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure46.9Operating income, Q3 FY2024, three months to 2024-09-30$46.9m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure54.5Operating income, Q4 FY2024, three months to 2024-12-31$54.5m. XBRL concept us-gaap:OperatingIncomeLoss. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure29.2Operating income, Q1 FY2025, three months to 2025-03-31$29.2m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure29.0Operating income, Q2 FY2025, three months to 2025-06-30$29.0m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure25.0Operating income, Q3 FY2025, three months to 2025-09-30$25.0m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure36.2Operating income, Q4 FY2025, three months to 2025-12-31$36.2m. XBRL concept us-gaap:OperatingIncomeLoss. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure8.0Operating income, Q1 FY2026, three months to 2026-03-31$8.0m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure20.3Operating income, Q2 FY2026, three months to 2026-06-30$20.3m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Interest expense$m1.3Interest expense, Q3 FY2023, three months to 2023-09-30$1.3m. XBRL concept us-gaap:InterestExpense. 10-Q filed 2023-11-02, accession 0001558370-23-017452.Report this figure1.3Interest expense, Q4 FY2023, three months to 2023-12-31$1.3m. XBRL concept us-gaap:InterestExpense. 10-K/A filed 2024-02-28, accession 0001558370-24-001969. Derived: 12-month figure less the 9-month figure.Report this figure1.3Interest expense, Q1 FY2024, three months to 2024-03-31$1.3m. XBRL concept us-gaap:InterestExpense. 10-Q filed 2024-05-02, accession 0001558370-24-006510.Report this figure1.3Interest expense, Q2 FY2024, three months to 2024-06-30$1.3m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure1.3Interest expense, Q3 FY2024, three months to 2024-09-30$1.3m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure1.4Interest expense, Q4 FY2024, three months to 2024-12-31$1.4m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure1.4Interest expense, Q1 FY2025, three months to 2025-03-31$1.4m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure1.4Interest expense, Q2 FY2025, three months to 2025-06-30$1.4m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure1.3Interest expense, Q3 FY2025, three months to 2025-09-30$1.3m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure1.3Interest expense, Q4 FY2025, three months to 2025-12-31$1.3m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure1.3Interest expense, Q1 FY2026, three months to 2026-03-31$1.3m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure1.3Interest expense, Q2 FY2026, three months to 2026-06-30$1.3m. XBRL concept us-gaap:InterestExpenseNonoperating. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Income tax$m7.7Income tax, Q3 FY2023, three months to 2023-09-30$7.7m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure16.4Income tax, Q4 FY2023, three months to 2023-12-31$16.4m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure7.4Income tax, Q1 FY2024, three months to 2024-03-31$7.4m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure6.4Income tax, Q2 FY2024, three months to 2024-06-30$6.4m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure6.8Income tax, Q3 FY2024, three months to 2024-09-30$6.8m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure8.7Income tax, Q4 FY2024, three months to 2024-12-31$8.7m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure4.5Income tax, Q1 FY2025, three months to 2025-03-31$4.5m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure3.6Income tax, Q2 FY2025, three months to 2025-06-30$3.6m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure4.2Income tax, Q3 FY2025, three months to 2025-09-30$4.2m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure5.7Income tax, Q4 FY2025, three months to 2025-12-31$5.7m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure1.4Income tax, Q1 FY2026, three months to 2026-03-31$1.4m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure2.1Income tax, Q2 FY2026, three months to 2026-06-30$2.1m. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Net income$m65.9Net income, Q3 FY2023, three months to 2023-09-30$65.9m. XBRL concept us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure71.1Net income, Q4 FY2023, three months to 2023-12-31$71.1m. XBRL concept us-gaap:NetIncomeLoss. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure51.6Net income, Q1 FY2024, three months to 2024-03-31$51.6m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure50.9Net income, Q2 FY2024, three months to 2024-06-30$50.9m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure48.6Net income, Q3 FY2024, three months to 2024-09-30$48.6m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure50.0Net income, Q4 FY2024, three months to 2024-12-31$50.0m. XBRL concept us-gaap:NetIncomeLoss. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure28.6Net income, Q1 FY2025, three months to 2025-03-31$28.6m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure31.4Net income, Q2 FY2025, three months to 2025-06-30$31.4m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure26.0Net income, Q3 FY2025, three months to 2025-09-30$26.0m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure34.3Net income, Q4 FY2025, three months to 2025-12-31$34.3m. XBRL concept us-gaap:NetIncomeLoss. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure9.2Net income, Q1 FY2026, three months to 2026-03-31$9.2m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure23.3Net income, Q2 FY2026, three months to 2026-06-30$23.3m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Diluted EPS$ per share1.99Diluted EPS, Q3 FY2023, three months to 2023-09-30$1.99 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figurenot reported1.57Diluted EPS, Q1 FY2024, three months to 2024-03-31$1.57 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure1.55Diluted EPS, Q2 FY2024, three months to 2024-06-30$1.55 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure1.49Diluted EPS, Q3 FY2024, three months to 2024-09-30$1.49 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figurenot reported0.88Diluted EPS, Q1 FY2025, three months to 2025-03-31$0.88 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure0.98Diluted EPS, Q2 FY2025, three months to 2025-06-30$0.98 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure0.83Diluted EPS, Q3 FY2025, three months to 2025-09-30$0.83 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figurenot reported0.30Diluted EPS, Q1 FY2026, three months to 2026-03-31$0.30 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure0.75Diluted EPS, Q2 FY2026, three months to 2026-06-30$0.75 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Basic EPS$ per share2.01Basic EPS, Q3 FY2023, three months to 2023-09-30$2.01 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figurenot reported1.58Basic EPS, Q1 FY2024, three months to 2024-03-31$1.58 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure1.56Basic EPS, Q2 FY2024, three months to 2024-06-30$1.56 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure1.49Basic EPS, Q3 FY2024, three months to 2024-09-30$1.49 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figurenot reported0.89Basic EPS, Q1 FY2025, three months to 2025-03-31$0.89 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure0.99Basic EPS, Q2 FY2025, three months to 2025-06-30$0.99 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure0.83Basic EPS, Q3 FY2025, three months to 2025-09-30$0.83 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figurenot reported0.30Basic EPS, Q1 FY2026, three months to 2026-03-31$0.30 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure0.76Basic EPS, Q2 FY2026, three months to 2026-06-30$0.76 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure

Balance sheet

Cash and equivalents$155.0m, Q2 FY2026
Shareholders' equity$1.07bn, Q2 FY2026
Axcelis Technologies Inc, balance sheet, quarterly
Line itemUnitQ3 FY20232023-09-30FY20232023-12-31Q1 FY20242024-03-31Q2 FY20242024-06-30Q3 FY20242024-09-30FY20242024-12-31Q1 FY20252025-03-31Q2 FY20252025-06-30Q3 FY20252025-09-30FY20252025-12-31Q1 FY20262026-03-31Q2 FY20262026-06-30
Cash and equivalents$m142Cash and equivalents, Q3 FY2023, at 2023-09-30$142.3m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2023-11-02, accession 0001558370-23-017452.Report this figure167Cash and equivalents, FY2023, at 2023-12-31$167.3m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-K filed 2025-02-28, accession 0001558370-25-001855.Report this figure134Cash and equivalents, Q1 FY2024, at 2024-03-31$134.0m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2024-05-02, accession 0001558370-24-006510.Report this figure145Cash and equivalents, Q2 FY2024, at 2024-06-30$145.2m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2024-08-01, accession 0001558370-24-010589.Report this figure120Cash and equivalents, Q3 FY2024, at 2024-09-30$120.1m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure124Cash and equivalents, FY2024, at 2024-12-31$123.5m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-K filed 2026-02-26, accession 0001104659-26-020461.Report this figure184Cash and equivalents, Q1 FY2025, at 2025-03-31$184.0m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure174Cash and equivalents, Q2 FY2025, at 2025-06-30$173.6m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure188Cash and equivalents, Q3 FY2025, at 2025-09-30$187.5m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure145Cash and equivalents, FY2025, at 2025-12-31$145.5m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure151Cash and equivalents, Q1 FY2026, at 2026-03-31$150.8m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure155Cash and equivalents, Q2 FY2026, at 2026-06-30$155.0m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Current assets$m1,015Current assets, Q3 FY2023, at 2023-09-30$1.02bn. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2023-11-02, accession 0001558370-23-017452.Report this figure1,080Current assets, FY2023, at 2023-12-31$1.08bn. XBRL concept us-gaap:AssetsCurrent. 10-K filed 2025-02-28, accession 0001558370-25-001855.Report this figure1,105Current assets, Q1 FY2024, at 2024-03-31$1.11bn. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2024-05-02, accession 0001558370-24-006510.Report this figure1,078Current assets, Q2 FY2024, at 2024-06-30$1.08bn. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2024-08-01, accession 0001558370-24-010589.Report this figure1,122Current assets, Q3 FY2024, at 2024-09-30$1.12bn. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure1,124Current assets, FY2024, at 2024-12-31$1.12bn. XBRL concept us-gaap:AssetsCurrent. 10-K filed 2026-02-26, accession 0001104659-26-020461.Report this figure1,114Current assets, Q1 FY2025, at 2025-03-31$1.11bn. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure1,064Current assets, Q2 FY2025, at 2025-06-30$1.06bn. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure984Current assets, Q3 FY2025, at 2025-09-30$984.0m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure943Current assets, FY2025, at 2025-12-31$943.2m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure936Current assets, Q1 FY2026, at 2026-03-31$935.7m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure980Current assets, Q2 FY2026, at 2026-06-30$979.8m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Total assets$m1,202Total assets, Q3 FY2023, at 2023-09-30$1.20bn. XBRL concept us-gaap:Assets. 10-Q filed 2023-11-02, accession 0001558370-23-017452.Report this figure1,282Total assets, FY2023, at 2023-12-31$1.28bn. XBRL concept us-gaap:Assets. 10-K filed 2025-02-28, accession 0001558370-25-001855.Report this figure1,307Total assets, Q1 FY2024, at 2024-03-31$1.31bn. XBRL concept us-gaap:Assets. 10-Q filed 2024-05-02, accession 0001558370-24-006510.Report this figure1,288Total assets, Q2 FY2024, at 2024-06-30$1.29bn. XBRL concept us-gaap:Assets. 10-Q filed 2024-08-01, accession 0001558370-24-010589.Report this figure1,338Total assets, Q3 FY2024, at 2024-09-30$1.34bn. XBRL concept us-gaap:Assets. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure1,349Total assets, FY2024, at 2024-12-31$1.35bn. XBRL concept us-gaap:Assets. 10-K filed 2026-02-26, accession 0001104659-26-020461.Report this figure1,341Total assets, Q1 FY2025, at 2025-03-31$1.34bn. XBRL concept us-gaap:Assets. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure1,323Total assets, Q2 FY2025, at 2025-06-30$1.32bn. XBRL concept us-gaap:Assets. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure1,352Total assets, Q3 FY2025, at 2025-09-30$1.35bn. XBRL concept us-gaap:Assets. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure1,361Total assets, FY2025, at 2025-12-31$1.36bn. XBRL concept us-gaap:Assets. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure1,375Total assets, Q1 FY2026, at 2026-03-31$1.37bn. XBRL concept us-gaap:Assets. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure1,387Total assets, Q2 FY2026, at 2026-06-30$1.39bn. XBRL concept us-gaap:Assets. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Current liabilities$m261Current liabilities, Q3 FY2023, at 2023-09-30$261.2m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2023-11-02, accession 0001558370-23-017452.Report this figure285Current liabilities, FY2023, at 2023-12-31$285.1m. XBRL concept us-gaap:LiabilitiesCurrent. 10-K filed 2025-02-28, accession 0001558370-25-001855.Report this figure277Current liabilities, Q1 FY2024, at 2024-03-31$276.6m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2024-05-02, accession 0001558370-24-006510.Report this figure244Current liabilities, Q2 FY2024, at 2024-06-30$244.2m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2024-08-01, accession 0001558370-24-010589.Report this figure252Current liabilities, Q3 FY2024, at 2024-09-30$252.3m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure208Current liabilities, FY2024, at 2024-12-31$207.5m. XBRL concept us-gaap:LiabilitiesCurrent. 10-K filed 2026-02-26, accession 0001104659-26-020461.Report this figure200Current liabilities, Q1 FY2025, at 2025-03-31$200.4m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure177Current liabilities, Q2 FY2025, at 2025-06-30$177.1m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure199Current liabilities, Q3 FY2025, at 2025-09-30$199.0m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure198Current liabilities, FY2025, at 2025-12-31$197.7m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure204Current liabilities, Q1 FY2026, at 2026-03-31$203.9m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure200Current liabilities, Q2 FY2026, at 2026-06-30$200.1m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Total liabilities$m401Total liabilities, Q3 FY2023, at 2023-09-30$400.7m. XBRL concept us-gaap:Liabilities. 10-Q filed 2023-11-02, accession 0001558370-23-017452.Report this figure417Total liabilities, FY2023, at 2023-12-31$417.1m. XBRL concept us-gaap:Liabilities. 10-K filed 2025-02-28, accession 0001558370-25-001855.Report this figure405Total liabilities, Q1 FY2024, at 2024-03-31$404.9m. XBRL concept us-gaap:Liabilities. 10-Q filed 2024-05-02, accession 0001558370-24-006510.Report this figure353Total liabilities, Q2 FY2024, at 2024-06-30$353.5m. XBRL concept us-gaap:Liabilities. 10-Q filed 2024-08-01, accession 0001558370-24-010589.Report this figure363Total liabilities, Q3 FY2024, at 2024-09-30$362.5m. XBRL concept us-gaap:Liabilities. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure336Total liabilities, FY2024, at 2024-12-31$336.0m. XBRL concept us-gaap:Liabilities. 10-K filed 2026-02-26, accession 0001104659-26-020461.Report this figure313Total liabilities, Q1 FY2025, at 2025-03-31$313.4m. XBRL concept us-gaap:Liabilities. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure301Total liabilities, Q2 FY2025, at 2025-06-30$301.1m. XBRL concept us-gaap:Liabilities. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure332Total liabilities, Q3 FY2025, at 2025-09-30$331.8m. XBRL concept us-gaap:Liabilities. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure327Total liabilities, FY2025, at 2025-12-31$326.7m. XBRL concept us-gaap:Liabilities. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure330Total liabilities, Q1 FY2026, at 2026-03-31$329.9m. XBRL concept us-gaap:Liabilities. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure321Total liabilities, Q2 FY2026, at 2026-06-30$321.0m. XBRL concept us-gaap:Liabilities. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure
Long-term debt$mnot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reported
Current portion of debt$mnot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reported
Shareholders' equity$m801Shareholders' equity, Q3 FY2023, at 2023-09-30$801.0m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure865Shareholders' equity, FY2023, at 2023-12-31$864.9m. XBRL concept us-gaap:StockholdersEquity. 10-K filed 2026-02-26, accession 0001104659-26-020461.Report this figure902Shareholders' equity, Q1 FY2024, at 2024-03-31$901.7m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure935Shareholders' equity, Q2 FY2024, at 2024-06-30$934.9m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure976Shareholders' equity, Q3 FY2024, at 2024-09-30$975.6m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure1,013Shareholders' equity, FY2024, at 2024-12-31$1.01bn. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure1,027Shareholders' equity, Q1 FY2025, at 2025-03-31$1.03bn. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure1,022Shareholders' equity, Q2 FY2025, at 2025-06-30$1.02bn. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure1,020Shareholders' equity, Q3 FY2025, at 2025-09-30$1.02bn. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure1,035Shareholders' equity, FY2025, at 2025-12-31$1.03bn. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure1,045Shareholders' equity, Q1 FY2026, at 2026-03-31$1.04bn. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure1,066Shareholders' equity, Q2 FY2026, at 2026-06-30$1.07bn. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure

Cash flow

Operating cash flow$18.4m, Q2 FY2026
Capital expenditure$3.6m, Q2 FY2026
Share repurchases$25.2m, Q4 FY2025
Axcelis Technologies Inc, cash flow, quarterly
Line itemUnitQ3 FY20232023-09-30Q4 FY20232023-12-31Q1 FY20242024-03-31Q2 FY20242024-06-30Q3 FY20242024-09-30Q4 FY20242024-12-31Q1 FY20252025-03-31Q2 FY20252025-06-30Q3 FY20252025-09-30Q4 FY20252025-12-31Q1 FY20262026-03-31Q2 FY20262026-06-30
Operating cash flow$m24.0Operating cash flow, Q3 FY2023, three months to 2023-09-30$24.0m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2024-11-07, accession 0001558370-24-014856. Derived: 9-month figure less the 6-month figure.Report this figure65.6Operating cash flow, Q4 FY2023, three months to 2023-12-31$65.6m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure42.2Operating cash flow, Q1 FY2024, three months to 2024-03-31$42.2m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure40.1Operating cash flow, Q2 FY2024, three months to 2024-06-30$40.1m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2025-08-05, accession 0001558370-25-010325. Derived: 6-month figure less the 3-month figure.Report this figure45.7Operating cash flow, Q3 FY2024, three months to 2024-09-30$45.7m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2025-11-06, accession 0001104659-25-107689. Derived: 9-month figure less the 6-month figure.Report this figure12.8Operating cash flow, Q4 FY2024, three months to 2024-12-31$12.8m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure39.8Operating cash flow, Q1 FY2025, three months to 2025-03-31$39.8m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure39.7Operating cash flow, Q2 FY2025, three months to 2025-06-30$39.7m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-08-06, accession 0001104659-26-091999. Derived: 6-month figure less the 3-month figure.Report this figure45.4Operating cash flow, Q3 FY2025, three months to 2025-09-30$45.4m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2025-11-06, accession 0001104659-25-107689. Derived: 9-month figure less the 6-month figure.Report this figure(6.6)Operating cash flow, Q4 FY2025, three months to 2025-12-31−$6.6m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure18.1Operating cash flow, Q1 FY2026, three months to 2026-03-31$18.1m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure18.4Operating cash flow, Q2 FY2026, three months to 2026-06-30$18.4m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-08-06, accession 0001104659-26-091999. Derived: 6-month figure less the 3-month figure.Report this figure
Capital expenditure$m5.3Capital expenditure, Q3 FY2023, three months to 2023-09-30$5.3m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2024-11-07, accession 0001558370-24-014856. Derived: 9-month figure less the 6-month figure.Report this figure10.2Capital expenditure, Q4 FY2023, three months to 2023-12-31$10.2m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure1.6Capital expenditure, Q1 FY2024, three months to 2024-03-31$1.6m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure2.0Capital expenditure, Q2 FY2024, three months to 2024-06-30$2.0m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2025-08-05, accession 0001558370-25-010325. Derived: 6-month figure less the 3-month figure.Report this figure3.9Capital expenditure, Q3 FY2024, three months to 2024-09-30$3.9m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2025-11-06, accession 0001104659-25-107689. Derived: 9-month figure less the 6-month figure.Report this figure4.7Capital expenditure, Q4 FY2024, three months to 2024-12-31$4.7m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure5.0Capital expenditure, Q1 FY2025, three months to 2025-03-31$5.0m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure2.0Capital expenditure, Q2 FY2025, three months to 2025-06-30$2.0m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-08-06, accession 0001104659-26-091999. Derived: 6-month figure less the 3-month figure.Report this figure2.0Capital expenditure, Q3 FY2025, three months to 2025-09-30$2.0m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2025-11-06, accession 0001104659-25-107689. Derived: 9-month figure less the 6-month figure.Report this figure2.3Capital expenditure, Q4 FY2025, three months to 2025-12-31$2.3m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure1.8Capital expenditure, Q1 FY2026, three months to 2026-03-31$1.8m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure3.6Capital expenditure, Q2 FY2026, three months to 2026-06-30$3.6m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-08-06, accession 0001104659-26-091999. Derived: 6-month figure less the 3-month figure.Report this figure
Share repurchases$m12.5Share repurchases, Q3 FY2023, three months to 2023-09-30$12.5m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-Q filed 2024-11-07, accession 0001558370-24-014856. Derived: 9-month figure less the 6-month figure.Report this figure15.0Share repurchases, Q4 FY2023, three months to 2023-12-31$15.0m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure15.0Share repurchases, Q1 FY2024, three months to 2024-03-31$15.0m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure15.0Share repurchases, Q2 FY2024, three months to 2024-06-30$15.0m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-Q filed 2025-08-05, accession 0001558370-25-010325. Derived: 6-month figure less the 3-month figure.Report this figure15.4Share repurchases, Q3 FY2024, three months to 2024-09-30$15.4m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-Q filed 2025-11-06, accession 0001104659-25-107689. Derived: 9-month figure less the 6-month figure.Report this figure15.1Share repurchases, Q4 FY2024, three months to 2024-12-31$15.1m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figure18.2Share repurchases, Q1 FY2025, three months to 2025-03-31$18.2m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure45.3Share repurchases, Q2 FY2025, three months to 2025-06-30$45.3m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-Q filed 2026-08-06, accession 0001104659-26-091999. Derived: 6-month figure less the 3-month figure.Report this figure32.3Share repurchases, Q3 FY2025, three months to 2025-09-30$32.3m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-Q filed 2025-11-06, accession 0001104659-25-107689. Derived: 9-month figure less the 6-month figure.Report this figure25.2Share repurchases, Q4 FY2025, three months to 2025-12-31$25.2m. XBRL concept us-gaap:PaymentsForRepurchaseOfCommonStock. 10-K filed 2026-02-26, accession 0001104659-26-020461. Derived: 12-month figure less the 9-month figure.Report this figurenot reportednot reported

Shares

Diluted shares (weighted)31.13m, Q2 FY2026
Axcelis Technologies Inc, shares, quarterly
Line itemUnitQ3 FY20222022-09-30Q1 FY20232023-03-31Q2 FY20232023-06-30Q3 FY20232023-09-30Q1 FY20242024-03-31Q2 FY20242024-06-30Q3 FY20242024-09-30Q1 FY20252025-03-31Q2 FY20252025-06-30Q3 FY20252025-09-30Q1 FY20262026-03-31Q2 FY20262026-06-30
Diluted shares (weighted)m shares33.4Diluted shares (weighted), Q3 FY2022, three months to 2022-09-3033,389,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2023-11-02, accession 0001558370-23-017452.Report this figure33.3Diluted shares (weighted), Q1 FY2023, three months to 2023-03-3133,293,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2024-05-02, accession 0001558370-24-006510.Report this figure33.2Diluted shares (weighted), Q2 FY2023, three months to 2023-06-3033,189,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2024-08-01, accession 0001558370-24-010589.Report this figure33.2Diluted shares (weighted), Q3 FY2023, three months to 2023-09-3033,159,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2024-11-07, accession 0001558370-24-014856.Report this figure32.9Diluted shares (weighted), Q1 FY2024, three months to 2024-03-3132,926,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2025-05-06, accession 0001558370-25-006534.Report this figure32.8Diluted shares (weighted), Q2 FY2024, three months to 2024-06-3032,771,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2025-08-05, accession 0001558370-25-010325.Report this figure32.7Diluted shares (weighted), Q3 FY2024, three months to 2024-09-3032,675,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure32.3Diluted shares (weighted), Q1 FY2025, three months to 2025-03-3132,335,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure31.9Diluted shares (weighted), Q2 FY2025, three months to 2025-06-3031,882,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure31.5Diluted shares (weighted), Q3 FY2025, three months to 2025-09-3031,450,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2025-11-06, accession 0001104659-25-107689.Report this figure31.0Diluted shares (weighted), Q1 FY2026, three months to 2026-03-3130,980,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-05-08, accession 0001104659-26-057725.Report this figure31.1Diluted shares (weighted), Q2 FY2026, three months to 2026-06-3031,134,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure

Shares outstanding: 30.88mShares outstanding, period not labelled, at 2026-08-0330,881,489 shares. XBRL concept dei:EntityCommonStockSharesOutstanding. 10-Q filed 2026-08-06, accession 0001104659-26-091999.Report this figure at Aug 3, 2026, from the cover of the 10-Q filed Aug 6, 2026.

Source: SEC EDGAR, XBRL company facts. Last ingested by Listed: Oct 24, 2026, 15:33 ET. Listed shows no prices and gives no investment advice.