Listed

Amtech Systems Inc

ASYSNasdaqCIK 720500IndustrialsFiscal year ends Sep 30

Standardized line items from XBRL company facts, the last twelve quarters. Negative values are in parentheses. A figure marked d is derived from year-to-date figures.

Income statement

Revenue$22.4m, Q3 FY2026
Operating income$2.2m, Q3 FY2026
Net income$1.7m, Q3 FY2026
Amtech Systems Inc, income statement, quarterly
Line itemUnitQ4 FY20232023-09-30Q1 FY20242023-12-31Q2 FY20242024-03-31Q3 FY20242024-06-30Q4 FY20242024-09-30Q1 FY20252024-12-31Q2 FY20252025-03-31Q3 FY20252025-06-30Q4 FY20252025-09-30Q1 FY20262025-12-31Q2 FY20262026-03-31Q3 FY20262026-06-30
Revenue$m27.7Revenue, Q4 FY2023, three months to 2023-09-30$27.7m. XBRL concept us-gaap:Revenues. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure24.9Revenue, Q1 FY2024, three months to 2023-12-31$24.9m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure25.4Revenue, Q2 FY2024, three months to 2024-03-31$25.4m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure26.7Revenue, Q3 FY2024, three months to 2024-06-30$26.7m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure24.1Revenue, Q4 FY2024, three months to 2024-09-30$24.1m. XBRL concept us-gaap:Revenues. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure24.4Revenue, Q1 FY2025, three months to 2024-12-31$24.4m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure15.6Revenue, Q2 FY2025, three months to 2025-03-31$15.6m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure19.6Revenue, Q3 FY2025, three months to 2025-06-30$19.6m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure19.8Revenue, Q4 FY2025, three months to 2025-09-30$19.8m. XBRL concept us-gaap:Revenues. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure19.0Revenue, Q1 FY2026, three months to 2025-12-31$19.0m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure20.5Revenue, Q2 FY2026, three months to 2026-03-31$20.5m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure22.4Revenue, Q3 FY2026, three months to 2026-06-30$22.4m. XBRL concept us-gaap:RevenueFromContractWithCustomerIncludingAssessedTax. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Cost of revenue$m20.3Cost of revenue, Q4 FY2023, three months to 2023-09-30$20.3m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure15.9Cost of revenue, Q1 FY2024, three months to 2023-12-31$15.9m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure17.0Cost of revenue, Q2 FY2024, three months to 2024-03-31$17.0m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure17.0Cost of revenue, Q3 FY2024, three months to 2024-06-30$17.0m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure14.3Cost of revenue, Q4 FY2024, three months to 2024-09-30$14.3m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure15.0Cost of revenue, Q1 FY2025, three months to 2024-12-31$15.0m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure15.9Cost of revenue, Q2 FY2025, three months to 2025-03-31$15.9m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure10.4Cost of revenue, Q3 FY2025, three months to 2025-06-30$10.4m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure11.0Cost of revenue, Q4 FY2025, three months to 2025-09-30$11.0m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure10.5Cost of revenue, Q1 FY2026, three months to 2025-12-31$10.5m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure10.7Cost of revenue, Q2 FY2026, three months to 2026-03-31$10.7m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure11.2Cost of revenue, Q3 FY2026, three months to 2026-06-30$11.2m. XBRL concept us-gaap:CostOfGoodsAndServicesSold. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Gross profit$m2.8Gross profit, Q4 FY2023, three months to 2023-09-30$2.8m. XBRL concept us-gaap:GrossProfit. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure8.2Gross profit, Q1 FY2024, three months to 2023-12-31$8.2m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure8.5Gross profit, Q2 FY2024, three months to 2024-03-31$8.5m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure9.8Gross profit, Q3 FY2024, three months to 2024-06-30$9.8m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure9.8Gross profit, Q4 FY2024, three months to 2024-09-30$9.8m. XBRL concept us-gaap:GrossProfit. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure9.4Gross profit, Q1 FY2025, three months to 2024-12-31$9.4m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure(0.3)Gross profit, Q2 FY2025, three months to 2025-03-31−$325.0k. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure9.1Gross profit, Q3 FY2025, three months to 2025-06-30$9.1m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure8.8Gross profit, Q4 FY2025, three months to 2025-09-30$8.8m. XBRL concept us-gaap:GrossProfit. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure8.5Gross profit, Q1 FY2026, three months to 2025-12-31$8.5m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure9.8Gross profit, Q2 FY2026, three months to 2026-03-31$9.8m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure11.2Gross profit, Q3 FY2026, three months to 2026-06-30$11.2m. XBRL concept us-gaap:GrossProfit. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Research and development$mnot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reported
Selling, general and administrative$m11.1Selling, general and administrative, Q4 FY2023, three months to 2023-09-30$11.1m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure8.6Selling, general and administrative, Q1 FY2024, three months to 2023-12-31$8.6m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure8.3Selling, general and administrative, Q2 FY2024, three months to 2024-03-31$8.3m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure8.2Selling, general and administrative, Q3 FY2024, three months to 2024-06-30$8.2m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure8.8Selling, general and administrative, Q4 FY2024, three months to 2024-09-30$8.8m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure8.1Selling, general and administrative, Q1 FY2025, three months to 2024-12-31$8.1m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure7.1Selling, general and administrative, Q2 FY2025, three months to 2025-03-31$7.1m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure7.4Selling, general and administrative, Q3 FY2025, three months to 2025-06-30$7.4m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure6.4Selling, general and administrative, Q4 FY2025, three months to 2025-09-30$6.4m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure6.9Selling, general and administrative, Q1 FY2026, three months to 2025-12-31$6.9m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure7.2Selling, general and administrative, Q2 FY2026, three months to 2026-03-31$7.2m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure8.0Selling, general and administrative, Q3 FY2026, three months to 2026-06-30$8.0m. XBRL concept us-gaap:SellingGeneralAndAdministrativeExpense. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Operating income$m(11.7)Operating income, Q4 FY2023, three months to 2023-09-30−$11.7m. XBRL concept us-gaap:OperatingIncomeLoss. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure(8.9)Operating income, Q1 FY2024, three months to 2023-12-31−$8.9m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure1.4Operating income, Q2 FY2024, three months to 2024-03-31$1.4m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure0.8Operating income, Q3 FY2024, three months to 2024-06-30$816.0k. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure0.0Operating income, Q4 FY2024, three months to 2024-09-30$26.0k. XBRL concept us-gaap:OperatingIncomeLoss. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure0.3Operating income, Q1 FY2025, three months to 2024-12-31$339.0k. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure(31.6)Operating income, Q2 FY2025, three months to 2025-03-31−$31.6m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.9Operating income, Q3 FY2025, three months to 2025-06-30$915.0k. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure1.8Operating income, Q4 FY2025, three months to 2025-09-30$1.8m. XBRL concept us-gaap:OperatingIncomeLoss. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure0.8Operating income, Q1 FY2026, three months to 2025-12-31$775.0k. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure1.8Operating income, Q2 FY2026, three months to 2026-03-31$1.8m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure2.2Operating income, Q3 FY2026, three months to 2026-06-30$2.2m. XBRL concept us-gaap:OperatingIncomeLoss. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Interest expense$m0.2Interest expense, Q4 FY2023, three months to 2023-09-30$178.0k. XBRL concept us-gaap:InterestExpense. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure0.2Interest expense, Q1 FY2024, three months to 2023-12-31$198.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure0.2Interest expense, Q2 FY2024, three months to 2024-03-31$193.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure0.1Interest expense, Q3 FY2024, three months to 2024-06-30$107.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure0.1Interest expense, Q4 FY2024, three months to 2024-09-30$59.0k. XBRL concept us-gaap:InterestExpense. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure0.0Interest expense, Q1 FY2025, three months to 2024-12-31$7.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure0.0Interest expense, Q2 FY2025, three months to 2025-03-31$6.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.0Interest expense, Q3 FY2025, three months to 2025-06-30$5.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure0.0Interest expense, Q4 FY2025, three months to 2025-09-30$7.0k. XBRL concept us-gaap:InterestExpense. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure0.0Interest expense, Q1 FY2026, three months to 2025-12-31$7.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure0.0Interest expense, Q2 FY2026, three months to 2026-03-31$9.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.0Interest expense, Q3 FY2026, three months to 2026-06-30$2.0k. XBRL concept us-gaap:InterestExpense. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Income tax$m0.1Income tax, Q4 FY2023, three months to 2023-09-30$139.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure0.1Income tax, Q1 FY2024, three months to 2023-12-31$58.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure0.2Income tax, Q2 FY2024, three months to 2024-03-31$223.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure0.5Income tax, Q3 FY2024, three months to 2024-06-30$457.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure0.2Income tax, Q4 FY2024, three months to 2024-09-30$237.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure0.4Income tax, Q1 FY2025, three months to 2024-12-31$445.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure0.3Income tax, Q2 FY2025, three months to 2025-03-31$272.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.8Income tax, Q3 FY2025, three months to 2025-06-30$799.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure0.8Income tax, Q4 FY2025, three months to 2025-09-30$818.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure0.6Income tax, Q1 FY2026, three months to 2025-12-31$581.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure0.5Income tax, Q2 FY2026, three months to 2026-03-31$502.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.6Income tax, Q3 FY2026, three months to 2026-06-30$616.0k. XBRL concept us-gaap:IncomeTaxExpenseBenefit. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Net income$m(12.0)Net income, Q4 FY2023, three months to 2023-09-30−$12.0m. XBRL concept us-gaap:NetIncomeLoss. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure(9.4)Net income, Q1 FY2024, three months to 2023-12-31−$9.4m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure1.0Net income, Q2 FY2024, three months to 2024-03-31$970.0k. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure0.4Net income, Q3 FY2024, three months to 2024-06-30$438.0k. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure(0.5)Net income, Q4 FY2024, three months to 2024-09-30−$536.0k. XBRL concept us-gaap:NetIncomeLoss. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure0.3Net income, Q1 FY2025, three months to 2024-12-31$312.0k. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure(31.8)Net income, Q2 FY2025, three months to 2025-03-31−$31.8m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.1Net income, Q3 FY2025, three months to 2025-06-30$106.0k. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure1.1Net income, Q4 FY2025, three months to 2025-09-30$1.1m. XBRL concept us-gaap:NetIncomeLoss. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure0.1Net income, Q1 FY2026, three months to 2025-12-31$108.0k. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure1.2Net income, Q2 FY2026, three months to 2026-03-31$1.2m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure1.7Net income, Q3 FY2026, three months to 2026-06-30$1.7m. XBRL concept us-gaap:NetIncomeLoss. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Diluted EPS$ per sharenot reported(0.66)Diluted EPS, Q1 FY2024, three months to 2023-12-31−$0.66 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure0.07Diluted EPS, Q2 FY2024, three months to 2024-03-31$0.07 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure0.03Diluted EPS, Q3 FY2024, three months to 2024-06-30$0.03 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figurenot reported0.02Diluted EPS, Q1 FY2025, three months to 2024-12-31$0.02 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure(2.23)Diluted EPS, Q2 FY2025, three months to 2025-03-31−$2.23 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.01Diluted EPS, Q3 FY2025, three months to 2025-06-30$0.01 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figurenot reported0.01Diluted EPS, Q1 FY2026, three months to 2025-12-31$0.01 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure0.08Diluted EPS, Q2 FY2026, three months to 2026-03-31$0.08 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.10Diluted EPS, Q3 FY2026, three months to 2026-06-30$0.10 per share. XBRL concept us-gaap:EarningsPerShareDiluted. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Basic EPS$ per sharenot reported(0.66)Basic EPS, Q1 FY2024, three months to 2023-12-31−$0.66 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure0.07Basic EPS, Q2 FY2024, three months to 2024-03-31$0.07 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure0.03Basic EPS, Q3 FY2024, three months to 2024-06-30$0.03 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figurenot reported0.02Basic EPS, Q1 FY2025, three months to 2024-12-31$0.02 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure(2.23)Basic EPS, Q2 FY2025, three months to 2025-03-31−$2.23 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.01Basic EPS, Q3 FY2025, three months to 2025-06-30$0.01 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figurenot reported0.01Basic EPS, Q1 FY2026, three months to 2025-12-31$0.01 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure0.08Basic EPS, Q2 FY2026, three months to 2026-03-31$0.08 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure0.11Basic EPS, Q3 FY2026, three months to 2026-06-30$0.11 per share. XBRL concept us-gaap:EarningsPerShareBasic. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure

Balance sheet

Cash and equivalents$83.1m, Q3 FY2026
Long-term debt$294.0k, FY2025
Shareholders' equity$115.6m, Q3 FY2026
Amtech Systems Inc, balance sheet, quarterly
Line itemUnitFY20232023-09-30Q1 FY20242023-12-31Q2 FY20242024-03-31Q3 FY20242024-06-30FY20242024-09-30Q1 FY20252024-12-31Q2 FY20252025-03-31Q3 FY20252025-06-30FY20252025-09-30Q1 FY20262025-12-31Q2 FY20262026-03-31Q3 FY20262026-06-30
Cash and equivalents$m13.1Cash and equivalents, FY2023, at 2023-09-30$13.1m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-K filed 2024-12-12, accession 0000950170-24-135825.Report this figure17.0Cash and equivalents, Q1 FY2024, at 2023-12-31$17.0m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2024-02-09, accession 0000950170-24-013277.Report this figure13.0Cash and equivalents, Q2 FY2024, at 2024-03-31$13.0m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2024-05-08, accession 0000950170-24-055725.Report this figure13.2Cash and equivalents, Q3 FY2024, at 2024-06-30$13.2m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2024-08-07, accession 0000950170-24-092822.Report this figure11.1Cash and equivalents, FY2024, at 2024-09-30$11.1m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-K filed 2025-12-10, accession 0001193125-25-314147.Report this figure13.2Cash and equivalents, Q1 FY2025, at 2024-12-31$13.2m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure13.4Cash and equivalents, Q2 FY2025, at 2025-03-31$13.4m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure15.6Cash and equivalents, Q3 FY2025, at 2025-06-30$15.6m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure17.9Cash and equivalents, FY2025, at 2025-09-30$17.9m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure22.1Cash and equivalents, Q1 FY2026, at 2025-12-31$22.1m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure24.4Cash and equivalents, Q2 FY2026, at 2026-03-31$24.4m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure83.1Cash and equivalents, Q3 FY2026, at 2026-06-30$83.1m. XBRL concept us-gaap:CashAndCashEquivalentsAtCarryingValue. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Current assets$m81.2Current assets, FY2023, at 2023-09-30$81.2m. XBRL concept us-gaap:AssetsCurrent. 10-K filed 2024-12-12, accession 0000950170-24-135825.Report this figure78.2Current assets, Q1 FY2024, at 2023-12-31$78.2m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2024-02-09, accession 0000950170-24-013277.Report this figure70.3Current assets, Q2 FY2024, at 2024-03-31$70.3m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2024-05-08, accession 0000950170-24-055725.Report this figure70.4Current assets, Q3 FY2024, at 2024-06-30$70.4m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2024-08-07, accession 0000950170-24-092822.Report this figure64.7Current assets, FY2024, at 2024-09-30$64.7m. XBRL concept us-gaap:AssetsCurrent. 10-K filed 2025-12-10, accession 0001193125-25-314147.Report this figure64.3Current assets, Q1 FY2025, at 2024-12-31$64.3m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure54.1Current assets, Q2 FY2025, at 2025-03-31$54.1m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure57.8Current assets, Q3 FY2025, at 2025-06-30$57.8m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure60.2Current assets, FY2025, at 2025-09-30$60.2m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure62.4Current assets, Q1 FY2026, at 2025-12-31$62.4m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure66.5Current assets, Q2 FY2026, at 2026-03-31$66.5m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure128Current assets, Q3 FY2026, at 2026-06-30$127.6m. XBRL concept us-gaap:AssetsCurrent. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Total assets$m137Total assets, FY2023, at 2023-09-30$137.0m. XBRL concept us-gaap:Assets. 10-K filed 2024-12-12, accession 0000950170-24-135825.Report this figure125Total assets, Q1 FY2024, at 2023-12-31$125.0m. XBRL concept us-gaap:Assets. 10-Q filed 2024-02-09, accession 0000950170-24-013277.Report this figure116Total assets, Q2 FY2024, at 2024-03-31$116.5m. XBRL concept us-gaap:Assets. 10-Q filed 2024-05-08, accession 0000950170-24-055725.Report this figure127Total assets, Q3 FY2024, at 2024-06-30$127.1m. XBRL concept us-gaap:Assets. 10-Q filed 2024-08-07, accession 0000950170-24-092822.Report this figure119Total assets, FY2024, at 2024-09-30$119.3m. XBRL concept us-gaap:Assets. 10-K filed 2025-12-10, accession 0001193125-25-314147.Report this figure118Total assets, Q1 FY2025, at 2024-12-31$117.8m. XBRL concept us-gaap:Assets. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure83.4Total assets, Q2 FY2025, at 2025-03-31$83.4m. XBRL concept us-gaap:Assets. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure89.5Total assets, Q3 FY2025, at 2025-06-30$89.5m. XBRL concept us-gaap:Assets. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure92.9Total assets, FY2025, at 2025-09-30$92.9m. XBRL concept us-gaap:Assets. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure94.1Total assets, Q1 FY2026, at 2025-12-31$94.1m. XBRL concept us-gaap:Assets. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure97.4Total assets, Q2 FY2026, at 2026-03-31$97.4m. XBRL concept us-gaap:Assets. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure157Total assets, Q3 FY2026, at 2026-06-30$156.7m. XBRL concept us-gaap:Assets. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Current liabilities$m29.7Current liabilities, FY2023, at 2023-09-30$29.7m. XBRL concept us-gaap:LiabilitiesCurrent. 10-K filed 2024-12-12, accession 0000950170-24-135825.Report this figure26.2Current liabilities, Q1 FY2024, at 2023-12-31$26.2m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2024-02-09, accession 0000950170-24-013277.Report this figure25.9Current liabilities, Q2 FY2024, at 2024-03-31$25.9m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2024-05-08, accession 0000950170-24-055725.Report this figure27.4Current liabilities, Q3 FY2024, at 2024-06-30$27.4m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2024-08-07, accession 0000950170-24-092822.Report this figure20.2Current liabilities, FY2024, at 2024-09-30$20.2m. XBRL concept us-gaap:LiabilitiesCurrent. 10-K filed 2025-12-10, accession 0001193125-25-314147.Report this figure19.0Current liabilities, Q1 FY2025, at 2024-12-31$19.0m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure16.7Current liabilities, Q2 FY2025, at 2025-03-31$16.7m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure18.8Current liabilities, Q3 FY2025, at 2025-06-30$18.8m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure20.5Current liabilities, FY2025, at 2025-09-30$20.5m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure21.5Current liabilities, Q1 FY2026, at 2025-12-31$21.5m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure23.2Current liabilities, Q2 FY2026, at 2026-03-31$23.2m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure23.6Current liabilities, Q3 FY2026, at 2026-06-30$23.6m. XBRL concept us-gaap:LiabilitiesCurrent. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Total liabilities$m48.7Total liabilities, FY2023, at 2023-09-30$48.7m. XBRL concept us-gaap:Liabilities. 10-K filed 2024-12-12, accession 0000950170-24-135825.Report this figure45.4Total liabilities, Q1 FY2024, at 2023-12-31$45.4m. XBRL concept us-gaap:Liabilities. 10-Q filed 2024-02-09, accession 0000950170-24-013277.Report this figure35.6Total liabilities, Q2 FY2024, at 2024-03-31$35.6m. XBRL concept us-gaap:Liabilities. 10-Q filed 2024-05-08, accession 0000950170-24-055725.Report this figure45.3Total liabilities, Q3 FY2024, at 2024-06-30$45.3m. XBRL concept us-gaap:Liabilities. 10-Q filed 2024-08-07, accession 0000950170-24-092822.Report this figure37.0Total liabilities, FY2024, at 2024-09-30$37.0m. XBRL concept us-gaap:Liabilities. 10-K filed 2025-12-10, accession 0001193125-25-314147.Report this figure35.3Total liabilities, Q1 FY2025, at 2024-12-31$35.3m. XBRL concept us-gaap:Liabilities. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure32.4Total liabilities, Q2 FY2025, at 2025-03-31$32.4m. XBRL concept us-gaap:Liabilities. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure37.7Total liabilities, Q3 FY2025, at 2025-06-30$37.7m. XBRL concept us-gaap:Liabilities. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure39.5Total liabilities, FY2025, at 2025-09-30$39.5m. XBRL concept us-gaap:Liabilities. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure40.0Total liabilities, Q1 FY2026, at 2025-12-31$40.0m. XBRL concept us-gaap:Liabilities. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure41.4Total liabilities, Q2 FY2026, at 2026-03-31$41.4m. XBRL concept us-gaap:Liabilities. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure41.1Total liabilities, Q3 FY2026, at 2026-06-30$41.1m. XBRL concept us-gaap:Liabilities. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure
Long-term debt$m10.7Long-term debt, FY2023, at 2023-09-30$10.7m. XBRL concept us-gaap:LongTermDebt. 10-K filed 2023-12-14, accession 0000950170-23-070422.Report this figurenot reportednot reportednot reported0.3Long-term debt, FY2024, at 2024-09-30$290.0k. XBRL concept us-gaap:LongTermDebt. 10-K filed 2024-12-12, accession 0000950170-24-135825.Report this figurenot reportednot reportednot reported0.3Long-term debt, FY2025, at 2025-09-30$294.0k. XBRL concept us-gaap:LongTermDebt. 10-K filed 2025-12-10, accession 0001193125-25-314147.Report this figurenot reportednot reportednot reported
Current portion of debt$mnot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reported
Shareholders' equity$m88.4Shareholders' equity, FY2023, at 2023-09-30$88.4m. XBRL concept us-gaap:StockholdersEquity. 10-K filed 2024-12-12, accession 0000950170-24-135825.Report this figure79.6Shareholders' equity, Q1 FY2024, at 2023-12-31$79.6m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2024-02-09, accession 0000950170-24-013277.Report this figure80.9Shareholders' equity, Q2 FY2024, at 2024-03-31$80.9m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2024-05-08, accession 0000950170-24-055725.Report this figure81.7Shareholders' equity, Q3 FY2024, at 2024-06-30$81.7m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2024-08-07, accession 0000950170-24-092822.Report this figure82.4Shareholders' equity, FY2024, at 2024-09-30$82.4m. XBRL concept us-gaap:StockholdersEquity. 10-K filed 2025-12-10, accession 0001193125-25-314147.Report this figure82.4Shareholders' equity, Q1 FY2025, at 2024-12-31$82.4m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure51.0Shareholders' equity, Q2 FY2025, at 2025-03-31$51.0m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure51.7Shareholders' equity, Q3 FY2025, at 2025-06-30$51.7m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure53.4Shareholders' equity, FY2025, at 2025-09-30$53.4m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure54.1Shareholders' equity, Q1 FY2026, at 2025-12-31$54.1m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure56.0Shareholders' equity, Q2 FY2026, at 2026-03-31$56.0m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure116Shareholders' equity, Q3 FY2026, at 2026-06-30$115.6m. XBRL concept us-gaap:StockholdersEquity. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure

Cash flow

Operating cash flow$1.1m, Q3 FY2026
Capital expenditure$126.0k, Q3 FY2026
Amtech Systems Inc, cash flow, quarterly
Line itemUnitQ4 FY20232023-09-30Q1 FY20242023-12-31Q2 FY20242024-03-31Q3 FY20242024-06-30Q4 FY20242024-09-30Q1 FY20252024-12-31Q2 FY20252025-03-31Q3 FY20252025-06-30Q4 FY20252025-09-30Q1 FY20262025-12-31Q2 FY20262026-03-31Q3 FY20262026-06-30
Operating cash flow$k(551)Operating cash flow, Q4 FY2023, three months to 2023-09-30−$551.0k. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure4,971Operating cash flow, Q1 FY2024, three months to 2023-12-31$5.0m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure336Operating cash flow, Q2 FY2024, three months to 2024-03-31$336.0k. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2025-05-12, accession 0000950170-25-069135. Derived: 6-month figure less the 3-month figure.Report this figure3,656Operating cash flow, Q3 FY2024, three months to 2024-06-30$3.7m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2025-08-06, accession 0000950170-25-104002. Derived: 9-month figure less the 6-month figure.Report this figure879Operating cash flow, Q4 FY2024, three months to 2024-09-30$879.0k. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure2,867Operating cash flow, Q1 FY2025, three months to 2024-12-31$2.9m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure210Operating cash flow, Q2 FY2025, three months to 2025-03-31$210.0k. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-05-07, accession 0001193125-26-211854. Derived: 6-month figure less the 3-month figure.Report this figure2,532Operating cash flow, Q3 FY2025, three months to 2025-06-30$2.5m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-08-05, accession 0000720500-26-000010. Derived: 9-month figure less the 6-month figure.Report this figure2,268Operating cash flow, Q4 FY2025, three months to 2025-09-30$2.3m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure4,103Operating cash flow, Q1 FY2026, three months to 2025-12-31$4.1m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure2,093Operating cash flow, Q2 FY2026, three months to 2026-03-31$2.1m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-05-07, accession 0001193125-26-211854. Derived: 6-month figure less the 3-month figure.Report this figure1,120Operating cash flow, Q3 FY2026, three months to 2026-06-30$1.1m. XBRL concept us-gaap:NetCashProvidedByUsedInOperatingActivities. 10-Q filed 2026-08-05, accession 0000720500-26-000010. Derived: 9-month figure less the 6-month figure.Report this figure
Capital expenditure$k976Capital expenditure, Q4 FY2023, three months to 2023-09-30$976.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-K filed 2024-12-12, accession 0000950170-24-135825. Derived: 12-month figure less the 9-month figure.Report this figure756Capital expenditure, Q1 FY2024, three months to 2023-12-31$756.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure1,220Capital expenditure, Q2 FY2024, three months to 2024-03-31$1.2m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2025-05-12, accession 0000950170-25-069135. Derived: 6-month figure less the 3-month figure.Report this figure3,334Capital expenditure, Q3 FY2024, three months to 2024-06-30$3.3m. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2025-08-06, accession 0000950170-25-104002. Derived: 9-month figure less the 6-month figure.Report this figure(432)Capital expenditure, Q4 FY2024, three months to 2024-09-30−$432.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure143Capital expenditure, Q1 FY2025, three months to 2024-12-31$143.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure9.0Capital expenditure, Q2 FY2025, three months to 2025-03-31$9.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-05-07, accession 0001193125-26-211854. Derived: 6-month figure less the 3-month figure.Report this figure552Capital expenditure, Q3 FY2025, three months to 2025-06-30$552.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-08-05, accession 0000720500-26-000010. Derived: 9-month figure less the 6-month figure.Report this figure246Capital expenditure, Q4 FY2025, three months to 2025-09-30$246.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-K filed 2025-12-10, accession 0001193125-25-314147. Derived: 12-month figure less the 9-month figure.Report this figure277Capital expenditure, Q1 FY2026, three months to 2025-12-31$277.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure198Capital expenditure, Q2 FY2026, three months to 2026-03-31$198.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-05-07, accession 0001193125-26-211854. Derived: 6-month figure less the 3-month figure.Report this figure126Capital expenditure, Q3 FY2026, three months to 2026-06-30$126.0k. XBRL concept us-gaap:PaymentsToAcquirePropertyPlantAndEquipment. 10-Q filed 2026-08-05, accession 0000720500-26-000010. Derived: 9-month figure less the 6-month figure.Report this figure
Share repurchases$knot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reportednot reported

Shares

Diluted shares (weighted)16.04m, Q3 FY2026
Amtech Systems Inc, shares, quarterly
Line itemUnitQ1 FY20232022-12-31Q2 FY20232023-03-31Q3 FY20232023-06-30Q1 FY20242023-12-31Q2 FY20242024-03-31Q3 FY20242024-06-30Q1 FY20252024-12-31Q2 FY20252025-03-31Q3 FY20252025-06-30Q1 FY20262025-12-31Q2 FY20262026-03-31Q3 FY20262026-06-30
Diluted shares (weighted)m shares14.0Diluted shares (weighted), Q1 FY2023, three months to 2022-12-3114,008,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2024-02-09, accession 0000950170-24-013277.Report this figure14.2Diluted shares (weighted), Q2 FY2023, three months to 2023-03-3114,157,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2024-05-08, accession 0000950170-24-055725.Report this figure14.1Diluted shares (weighted), Q3 FY2023, three months to 2023-06-3014,058,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2024-08-07, accession 0000950170-24-092822.Report this figure14.2Diluted shares (weighted), Q1 FY2024, three months to 2023-12-3114,188,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2025-02-05, accession 0000950170-25-014465.Report this figure14.2Diluted shares (weighted), Q2 FY2024, three months to 2024-03-3114,209,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2025-05-12, accession 0000950170-25-069135.Report this figure14.3Diluted shares (weighted), Q3 FY2024, three months to 2024-06-3014,254,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2025-08-06, accession 0000950170-25-104002.Report this figure14.3Diluted shares (weighted), Q1 FY2025, three months to 2024-12-3114,300,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure14.3Diluted shares (weighted), Q2 FY2025, three months to 2025-03-3114,296,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure14.3Diluted shares (weighted), Q3 FY2025, three months to 2025-06-3014,314,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure14.7Diluted shares (weighted), Q1 FY2026, three months to 2025-12-3114,679,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-02-05, accession 0001193125-26-039360.Report this figure14.9Diluted shares (weighted), Q2 FY2026, three months to 2026-03-3114,941,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-05-07, accession 0001193125-26-211854.Report this figure16.0Diluted shares (weighted), Q3 FY2026, three months to 2026-06-3016,040,000 shares. XBRL concept us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure

Shares outstanding: 17.51mShares outstanding, period not labelled, at 2026-07-3117,508,101 shares. XBRL concept dei:EntityCommonStockSharesOutstanding. 10-Q filed 2026-08-05, accession 0000720500-26-000010.Report this figure at Jul 31, 2026, from the cover of the 10-Q filed Aug 5, 2026.

Source: SEC EDGAR, XBRL company facts. Last ingested by Listed: Oct 24, 2026, 15:23 ET. Listed shows no prices and gives no investment advice.